- Summary
- Table Of Content
- Methodology
Extreme Ultraviolet (EUV) Lithography Market Size:
Extreme Ultraviolet (EUV) Lithography Market size is estimated to reach over USD 36.11 Billion by 2032 from a value of USD 11.71 Billion in 2024 and is projected to grow by USD 13.25 Billion in 2025, growing at a CAGR of 13.4% from 2025 to 2032.
Extreme Ultraviolet (EUV) Lithography Market Scope & Overview:
Extreme ultraviolet (EUV) lithography refers to a technology used in semiconductor manufacturing. It is a type of photolithography that uses extremely short wavelengths of light, typically around 13.5 nanometers (nm), for creating complex patterns on semiconductor substrates or wafers. Moreover, extreme ultraviolet (EUV) lithography is used for manufacturing advanced chips utilized in smartphones, consumer electronics devices, high-performance computing devices, artificial intelligence, augmented reality, and other industrial applications.
Extreme Ultraviolet (EUV) Lithography Market Dynamics - (DRO) :
Key Drivers:
Growing demand for semiconductors is propelling the extreme ultraviolet (EUV) lithography market growth
The rising consumer preference for smaller and more powerful electronic devices such as smartphones, tablets, wearables, and others is driving the need for more compact and efficient semiconductor components. Moreover, the growing demand for higher computing power, driven by applications in artificial intelligence (AI), machine learning (ML), data analytics, internet of things (IoT), and cloud computing is also propelling the need for advanced semiconductors.
Additionally, the emergence of new technologies including 5G, autonomous vehicles, industrial automation, and others are further driving the adoption of semiconductors in multiple industries. EUV lithography is a key technology used in semiconductor manufacturing for creating complex patterns on semiconductor substrates or wafers. As a result, the growing need for advanced semiconductors in multiple industries is driving the market.
- For instance, according to the Semiconductor Industry Association, the global sales of semiconductors was valued at USD 627.6 billion in 2024, witnessing an increase of 19.1% in comparison to USD 526.8 billion in 2023.
Hence, the growing need for semiconductors is proliferating the extreme ultraviolet (EUV) lithography market size.
Key Restraints:
Availability of alternative solutions is restraining the extreme ultraviolet (EUV) lithography market growth
There are several alternative solutions to extreme ultraviolet (EUV) lithography including deep ultraviolet (DUV) lithography, X-ray lithography, electron beam lithography, nanoimprint lithography, and others. Moreover, the alternative solutions have similar benefits and applications in comparison to EUV lithography, which is a key factor restricting the market.
For instance, DUV lithography typically uses wavelengths around 193 nm, utilizing lasers to project patterns onto photoresists. Meanwhile, X-ray lithography involves the use of X-rays to pattern photoresists on substrates. Additionally, electron beam lithography employs a focused beam of electrons for creating patterns on a substrate that is coated with an electron-sensitive film. It offers extremely high resolution and it is ideal for creating very fine features and prototypes.
Further, nanoimprint lithography utilizes mechanical pressure to imprint nanoscale patterns directly onto a substrate. Nanoimprint lithography can create features with very high resolution and it is potentially less expensive than EUV lithography for certain applications. Thus, the availability of several alternative solutions is hindering the extreme ultraviolet (EUV) lithography market expansion.
Future Opportunities :
Rising government initiatives to facilitate semiconductor manufacturing are expected to drive the extreme ultraviolet (EUV) lithography market opportunities
EUV lithography systems play a vital role in the fabrication of innovative semiconductors, allowing the production of smaller, more powerful, and energy-efficient chips. As a result, the rising government initiatives, such as subsidies, incentives, tax credits, and others, to facilitate semiconductor manufacturing are expected to promote lucrative aspects for market growth.
- For instance, in 2022, the government of China increased chip subsidies valued at approximately USD 150 billion along with upgrading the country’s tax credit for investments in semiconductor research and development (R&D) by 20%. The subsidies and tax credits aim to boost the growth of the semiconductor sector in the country.
Thus, as per the analysis, the above factors are projected to drive the extreme ultraviolet (EUV) lithography market opportunities during the forecast period.
Extreme Ultraviolet (EUV) Lithography Market Segmental Analysis :
By Light Source:
Based on light source, the market is segmented into laser-produced plasma (LPP), gas discharge, and others.
Trends in the light source:
- Increasing trend in adoption of laser-produced plasma as a light source for EUV lithography due to its high throughput, precise wavelength control, and scalability, is driving the extreme ultraviolet (EUV) lithography market size.
- There is a rising trend towards the use of LLP sources for delivering high-intensity, stable EUV light to facilitate fast wafer exposure and support high-volume semiconductor manufacturing.
The laser-produced plasmas (LPP) segment accounted for the largest revenue share in the total extreme ultraviolet (EUV) lithography market share in 2024, and it is anticipated to register the fastest CAGR growth during the forecast period.
- A laser-produced plasma (LPP) light source uses intense lasers focused on tin droplets for generating EUV light in vacuum.
- Moreover, laser-produced plasma sources can deliver high-intensity, stable EUV light, which enables fast wafer exposure and supports high-volume semiconductor manufacturing.
- For instance, ASML is a EUV lithography system manufacturer that utilizes laser-produced plasma (LPP) sources for its lithography process. In ASML’s laser-produced plasma source, droplets of molten tin (approximately 25 microns in diameter) are emitted from a generator at a speed of 70 meters per second. The emitted droplets are hit by a low-intensity laser pulse for flattening them into a pancake shape. Further, a powerful laser pulse is used for vaporizing the flattened droplet for creating a plasma that emits EUV light.
- According to the extreme ultraviolet (EUV) lithography market analysis, the rising advancements associated with laser-produced plasma (LPP) sources for EUV lithography are driving the extreme ultraviolet (EUV) lithography market trends.
By End-User:
Based on the end-user, the market is segmented into foundries, integrated device manufacturers (IDMs), and others.
Trends in the end-user:
- Factors including continuous advancements in the semiconductor industry, particularly in the production of smaller and more complex chips, are key trends boosting the market growth.
- Factors including growing demand for semiconductors from multiple industries including consumer electronics, automotive, telecommunication, and others, along with increasing investments in development of semiconductor fabrication facilities are key trends driving the market.
The foundries segment accounted for a significant revenue share of 58.90% in the overall extreme ultraviolet (EUV) lithography market share in 2024.
- Foundries refers to a company that operates semiconductor fabrication plants focused on producing integrated circuits (ICs) for other companies instead of offering IC products of their own design.
- Major examples of foundries include TSMC (Taiwan Semiconductor Manufacturing Company), GlobalFoundries, and Samsung Foundry among others.
- Moreover, EUV lithography is often used in foundries to produce smaller and more complex chip designs, which are crucial for modern electronics, including smartphones, high-performance computing, and IoT devices among others.
- For instance, in August 2023, Taiwan Semiconductor Manufacturing Company Limited, a pure-play semiconductor foundry, established a joint venture with Infineon Technologies AG, Robert Bosch GmbH, and NXP Semiconductors N.V. with the aim of investing in European Semiconductor Manufacturing Company (ESMC) GmbH in Germany. ESMC marks a crucial step towards the construction of a 300mm fab for supporting the future capacity needs of the fast-growing automotive and industrial sectors.
- According to the analysis, the rising developments associated with semiconductor foundries are driving the adoption of EUV lithography, in turn propelling the market.
The integrated device manufacturers (IDMs) segment is anticipated to register a significant CAGR growth during the forecast period.
- An integrated device manufacturer (IDM) refers to a semiconductor company that designs, manufactures, and sells IC products.
- Moreover, IDMs are responsible for managing all processes involved in semiconductor manufacturing from planning, and production to sales of final products.
- Few examples of IDMs include Intel, Micron Technology, and Texas Instruments among others.
- IDMs often invest in their own fabrication facilities and may also engage in foundry services, manufacturing chips for other companies in addition to their own products.
- For instance, in December 2023, ASML shipped its first modules of the EUV lithography system to Intel, an integrated device manufacturer (IDM). The adoption of TWINSCAN EXE: 5000 EUV lithography system represents a substantial step forward for cutting-edge chip manufacturing.
- Therefore, the above factors are projected to drive the market during the forecast period.
Regional Analysis:
The regions covered are North America, Europe, Asia Pacific, the Middle East and Africa, and Latin America.
Asia Pacific region was valued at USD 4.84 Billion in 2024. Moreover, it is projected to grow by USD 5.49 Billion in 2025 and reach over USD 15.50 Billion by 2032. Out of this, China accounted for the maximum revenue share of 37.42%. As per the extreme ultraviolet (EUV) lithography market analysis, the adoption of EUV lithography systems in the Asia-Pacific region is primarily driven by the rising pace of industrialization and growing need for semiconductors in the region. Additionally, the prevalence of several semiconductor manufacturers and rising government initiatives and investments to facilitate the production of semiconductors are further accelerating the extreme ultraviolet (EUV) lithography market expansion.
- For instance, in November 2021, Japan approved USD 6.8 billion in funding to support domestic semiconductor manufacturing, as a part of its target to boost domestic chip revenue by 2030. The above factors are further driving the adoption of EUV lithography technology, in turn propelling the extreme ultraviolet (EUV) lithography market trends in the Asia-Pacific region.
North America is estimated to reach over USD 10.58 Billion by 2032 from a value of USD 3.45 Billion in 2024 and is projected to grow by USD 3.91 Billion in 2025. In North America, the growth of extreme ultraviolet (EUV) lithography industry is driven by rising investments in the development of semiconductor fabrication facilities among others. Moreover, the increasing government initiatives to support semiconductor manufacturing in the region are further contributing to the extreme ultraviolet (EUV) lithography market demand.
- For instance, in December 2022, Taiwan Semiconductor Manufacturing Co. announced investments up to USD 40 billion in the development of new semiconductor fabrication plants in the United States. The first plant was scheduled to begin manufacturing operations by 2024 while the second plant is projected to be operational by 2026. The above factors are projected to drive the market demand in North America during the forecast period.
In addition, the regional analysis depicts that the growing need for advanced semiconductors from multiple industries including automotive, healthcare, consumer electronics, and others is driving the extreme ultraviolet (EUV) lithography market demand in Europe. Furthermore, as per the market analysis, the market demand in Latin America, Middle East, and African regions is expected to grow at a considerable rate due to factors such as rising electronics production and increasing investments to promote semiconductor manufacturing among others.
Top Key Players and Market Share Insights:
The global extreme ultraviolet (EUV) lithography market is highly competitive with major players providing solutions to the national and international markets. Key players are adopting several strategies in research and development (R&D), product innovation, and end-user launches to hold a strong position in the extreme ultraviolet (EUV) lithography market. Key players in the extreme ultraviolet (EUV) lithography industry include-
- ASML (Netherlands)
- Carl Zeiss AG (Germany)
- Lasertec Corporation (Japan)
- Photronics Inc. (U.S)
- HOYA Corporation (Japan)
- Advantest Corporation (Japan)
- NTT Advanced Technology Corporation (Japan)
- KLA Corporation (U.S)
- Applied Materials Inc. (U.S)
- SUSS MicroTec SE (Germany)
Recent Industry Developments :
Partnerships & Collaborations:
- In January 2024, the first machine for the new lithography technology including an optical system from Zeiss was recently delivered by ASML. Zeiss Semiconductor Manufacturing Technology (SMT), with its strategic partner, ASML created the basic prerequisites for the fabrication of integrated circuits at a new level. The new High-NA-EUV lithography system from ASML enables the production of more powerful, energy-efficient, and cost-effective chips. The first series of production utilizing the new technology is scheduled to begin in 2025.
Extreme Ultraviolet (EUV) Lithography Market Report Insights :
| Report Attributes | Report Details |
| Study Timeline | 2019-2032 |
| Market Size in 2032 | USD 36.11 Billion |
| CAGR (2025-2032) | 13.4% |
| By Light Source |
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| By End-Use |
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| By Region |
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| Key Players |
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| North America | U.S. Canada Mexico |
| Europe | U.K. Germany France Spain Italy Russia Benelux Rest of Europe |
| APAC | China South Korea Japan India Australia ASEAN Rest of Asia-Pacific |
| Middle East and Africa | GCC Turkey South Africa Rest of MEA |
| LATAM | Brazil Argentina Chile Rest of LATAM |
| Report Coverage |
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Key Questions Answered in the Report
How big is the extreme ultraviolet (EUV) lithography market? +
The extreme ultraviolet (EUV) lithography market was valued at USD 11.71 Billion in 2024 and is projected to grow to USD 36.11 Billion by 2032.
Which is the fastest-growing region in the extreme ultraviolet (EUV) lithography market? +
Asia-Pacific is the region experiencing the most rapid growth in the extreme ultraviolet (EUV) lithography market.
What specific segmentation details are covered in the extreme ultraviolet (EUV) lithography report? +
The extreme ultraviolet (EUV) lithography report includes specific segmentation details for light source, end-user, and region.
Who are the major players in the extreme ultraviolet (EUV) lithography market? +
The key participants in the extreme ultraviolet (EUV) lithography market are ASML (Netherlands), Carl Zeiss AG (Germany), Advantest Corporation (Japan), NTT Advanced Technology Corporation (Japan), KLA Corporation (U.S), Applied Materials Inc. (U.S), SUSS MicroTec SE (Germany), Lasertec Corporation (Japan), Photronics Inc. (U.S), HOYA Corporation (Japan), and others.
